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CTS-SAM Scanning Acoustic Microscope

The newly launched CTS-SAM Scanning Acoustic Microscope by our STNDT is specifically designed for high-end sectors such as semiconductor manufacturing and precision component processing. It effectively meets the stringent requirements for the rapid, precise, and high-volume detection of microscopic defects.

Product Intro

The continuous advancement of high-end manufacturing towards greater precision, higher integration, and superior reliability has imposed unprecedented demands on the non-destructive testing (NDT) of subtle internal structures and defects in critical materials. With its non-destructive nature, deep penetration capabilities, and excellent internal imaging, the industrial Scanning Acoustic Microscope (SAM) has become a core technology for microscopic quality assessment and defect detection.

The newly launched CTS-SAM Scanning Acoustic Microscope by our STNDT is specifically designed for high-end sectors such as semiconductor manufacturing and precision component processing. It effectively meets the stringent requirements for the rapid, precise, and high-volume detection of microscopic defects.

Feature
  •  System Composition:

    The system comprises a frame, a high-precision linear motor scanning platform, a multi-degree-of-freedom probe fixture, a water tank, a water filtration and circulation system, a high-frequency pulser/receiver, a remote pulser, a high-frequency data acquisition card, an electronic control system, and software.

  •  Domestic Core Technology:

    The excitation utilizes our independently developed high-frequency pulser/receiver, the CTS-8072PR-500M. This breaks the monopoly of foreign technologies, achieving full localization and autonomous control.

  •  Rich Scan Planning Functions:

    It supports multi-workpiece planning, multi-scan surface planning, automatic path planning, teach path planning, and external path planning to meet diverse application needs.

  • Motion Control Functions:

    Includes single-axis jog mode, single-axis absolute mode, single-axis relative mode, TCP control mode, and motion system calibration.

  •  Comprehensive Scanning Functions:

    Covers Amplitude C-scan, Depth C-scan, Multi-layer C-scan, and Through-transmission C-scan. It also features an interface wave tracking function to achieve interface wave acoustic path compensation.

  •  C-scan Navigation:

    Users can click on a specific pixel in the C-scan image to precisely move the probe to the corresponding position on the actual workpiece.

  •  Multi-dimensional View Display:

    Supports A-scan, B-scan, C-scan, D-scan, 3D views, and FFT spectrum analysis. It records A-scan waveform data and saves all views throughout the entire process.

  •  Comprehensive and Powerful Data Analysis:

    Features include:

  •  X, Y, Z Thickness and Distance Measurement: Calculates the defect percentage based on manually drawn outlines (circle, rectangle, polygon).

  •  CAD Template Matching: Calculates the defect percentage based on imported CAD outline templates.

  •  Auto-defect Detection: Automatically identifies and outlines defects.

  • Defect Logging: Records defect lists and accurately locates defect positions.

  • Bonding Rate Calculation: Automatically calculates the bonding rate.

  • Local Gating and Thresholding: Allows users to draw a box on the C-scan image to modify local gates and thresholds.

  •  Customizable Display: Offers multiple selectable color palettes and custom palette import. Supports scale unit switching, color scale range definition, and the display/hide functions for multiple layers.

Parameter
ItemSpecification
Dimensions1364mm × 1180mm × 2050mm
Inspection Range440mm × 340mm × 200mm
Scanning Speed≤1000mm/s
RepeatabilityX/Y Axis: ±0.001mm; Z Axis: ±0.01mm
Water Tank Dimensions876mm × 1040mm × 250mm
Rated VoltageAC 220V ±5%, 50Hz ±2%
Rated Current10A
Power Consumption1.5kW
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